CDHT
Introduction | Halftone and CD are simultaneously measured to optimize process conditions such as exposure amount, coating amount, and etching amount in LCD process |
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Features |
Simultaneous measurement of CD / thickness / height in one measurement Nano-level resolution, high-speed measurement Measurement Item: Halftone thickness, Overlay, Hole, PR, Metal, ITO Slit line width measurement etc. |
Application | TFT Photo process, TFT PECVD process, Flexible TFT substrate PI thickness measurement |