LCD
OLED
EL3600
HELISYS
DSP
TFE
Sputter
Solar Photovoltaic
Optical Measurement
Semiconductor
 
Summary

OLED Deposition & Encapsulation System
for R&D and Pilot production

Features

- Substrate size : from 200mm x 200mm ~
- System integration : Cluster type

Application OLED, Micron display
Description

HELISYS is configured as cluster system to
process full color OLED device as well as mono
and area color device for R&D and Pilot production.