- Enables compositional variation throughout the film
- Enables temperature variations during deposition
- Provides thin film deposition for the highest efficient
devices
- Improves throughput
- Enables direct scale up from the development line to
production
Application
Thin Film Sputtering, Solar Cell
Description
CIGS thin film solar cell absorber layer deposition
System enables deposition Cu/In/Ga/Se as
scanning substrate.