LCD
OLED
EL3600
HELISYS
DSP
TFE
Sputter
Solar Photovoltaic
Optical Measurement
Semiconductor
 
Summary

Thin Film layer deposition System by sputtering

Features

- Enables compositional variation throughout the film
- Enables temperature variations during deposition
- Provides thin film deposition for the highest efficient
  devices
- Improves throughput
- Enables direct scale up from the development line to
  production

Application Thin Film Sputtering, Solar Cell
Description

CIGS thin film solar cell absorber layer deposition
System enables deposition Cu/In/Ga/Se as
scanning substrate.