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| Description |
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Using Enhanced Phase Scanning Interferometry, the Interscan Series SIS-2000 Provides High Resolution, Precise Surface Measurement and Surface Parameters Characterization |
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| Sample Stage |
Manual: X, Y, Z, Tip/Tilt |
| Objective Mounting |
Manual 5-Position
Indexing Turret |
| Stage Stroke |
X,Y : 200mm
Tip/Tilt :กพ3กษ
Z: 100mm |
| Vertical Resolution |
Up to 0.1 nm |
| Option |
Auto 5-Position Indexing Turret |
Lens : 2.5X, 5X, 10X, 20X, 50X
Step Height Standard, Lateral Calibration Standard |
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LCD
