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 2D
Measurement |
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| 3D
Measurement |
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Optic Inspection |
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SNU Precision developed the WIS-D250 with long
experience of optics and measurement technology.
The WIS-D250 inspects all patterns, shapes and defects
of wafer with sub micron accuracy.
It aligns inspects wafer automatically after loading
Cad file. |
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Non-destructive Measurement |
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Multiple Fiels-of view Lens |
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Fast Measurement and Ease of Use |
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Wafer Pattern Inspection (Height, Width,
Area, Angle...) |
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Wafer Defect Detection & Classification (Dust,
Scratch, Residuals...) |
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| Measurement
Function |
Geometry Features, Moment
Features |
| Fine Alignment Alogirithm, Pattern
Inspection,Defect Detection & Classification |
| Wafer Information Loading, Report/Save,Auto
Pattern Inspection and semi Auto Inspection |
| Optics |
640 X 480 Progressive B/W CCD Camera, |
| Motorized revolving nosepiece with
5 holes |
| Stage |
Fixed Stage with Vertical Axis (250
X 250 X 100mm) |
| Main Body |
Material: Granite Assembly (500 X
500 X 100mm) |
| Vibration Isolation Table |
High Quality Air Spring Included.(600
X 600 X 800mm) |
| Processor |
Pentium IV Processor, 1G Ram, 40G
HDD |
| Monitor |
17" TFT LCD Monitor OS Windows2000
Dimension 600 X 600 X 1400mm |
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| Specification |
Rotation |
X-Axis |
Y-Axis |
Z-Axis |
| Material |
Granite Assembly / Moving
Part : AI6061-T6 |
| Finishes |
Hard Anodized |
| Drive Mechanism |
Direct Drive |
Linear Motor |
Linear Motor |
Precision Ball Screw |
| Bearings |
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Cross Roller Guide |
Cross Roller Guide |
Cross Roller Guide |
| Motors |
DD Servo Motor |
Linear Motor |
Linear Motor |
Rotary Servo Motor |
| Feedback |
Rotary Encoder |
Linear Encoder |
Linear Encoder |
Linear Encoder |
| Total Travel |
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250mm |
250mm |
100mm |
| Encoder Resolution |
655,360(p/rev) |
0.2um |
0.2um |
0.2um |
Accuracy
(after calibration by Laser Interferometer) |
±15arcsec |
±3um |
±3um |
±3um |
| Repeatability |
±2arcsec |
±1um |
±1um |
±1um |
| Max.Velocity |
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200mm/s |
200mm/s |
100mm/s |
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| Inspection Time |
< 30 frames / 1 sec |
| Revolver |
Motorized revolving nosepiece
with 5 holes |
| Minimum Defect Size |
< 0.6um (50 x Magnification)
/ 0.2um (DUV Optic) |
| Data Points |
307,200 Points (640 x
480) |
| Optics |
5 X |
10 X |
20 X |
50 X |
100 X |
| Field of View[um] |
1760 X 1320 |
880 X 660 |
440 X 330 |
176 X 132 |
88 X 66 |
| Working Distance[mm] |
12 |
6.5 |
3 |
10.6 |
3.4 |
| Spatial Sampling |
1.28 |
0.64 |
0.32 |
0.13 |
0.06 |
| Light Source |
Halogen Lamp |
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