| |
|
 |
Use of laser-beam system for detecting
the probe position and torsion |
|
Operation in static and dynamic mode |
|
Digital scanning control system |
|
Positioning of the sample under probe |
|
Embedding a CCD camera for observing the probe and
scanned area on the
sample surface |
|
Modular structure of the control electric unit and
software |
| |
|
2D
Measurement 
