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Using Enhanced Phase Scanning
Interferometry, the Interscan Series
SIS-1000 Provides High Resolution, Precise
Surface Measurement and Surface Parameters
Characterization |
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Non-destructive Measurement |
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3 Dimensional Surface Measurement |
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Multiple Field of View Lenses |
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Nanometer Level Resolution and Large Measuring
Range |
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Fast Measurement and Ease of Use |
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- Just Focus and Measure
- Fast and Convenient Loading and Setup
- User Interface based on Windows Operating system
- Fast and Robust Algorithm
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Powerful Anaylsis Software |
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- Accurate Surface Characterization |
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Semiconductor Wafers |
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LCD Application (CS, LGP, BLU) |
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MEMS |
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Optic Fiber Product (Ferrule , Pigtail) |
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Data Storage Surface (HDD, DVD, CD) |
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Materials Research |
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Precision Machined Surface |
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Bio-Medical Engineering |
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| Measurement
Technique |
Enhanced
Phase Scanning Interferometry
Phase Shift Interferometry |
| Magnification |
2.5x |
5x |
10x |
20x |
50x |
| Field
of View(mm) |
2.77
x 2.08 |
1.39
x 1.04 |
0.69
x 0.52 |
0.35
x 0.26 |
0.14
x 0.10 |
| Lateral
Resolution |
4.72um |
2.72um |
1.18um |
0.88um |
0.64um |
| Controller |
IBM
Compatible PC |
| Software |
i2000
and SNUMap
Running under Windows 2000 |
| Scanner |
Closed-loop
Controlled PZT Actuator |
| Anti-Vibration
Table |
Air
Leveling Type |
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SIS-2000 |
SIS-1200 |
| Scanner
Stroke |
200um |
200um |
| Sample
Stage |
Motorized:
X,Y,Z,Tip/Tilt |
Manual:
X,Y,Z,Tip/Tilt |
| Objective
Mounting |
Manual
6-position
Indexing Turret |
Single
Mount Adapter |
| Stage
Stroke |
X,Y:
200mm
Tip/Tilt: ¡¾3¡Æ
Z: 100mm |
X:
150mm, Y:100mm
Tip/Tilt: ¡¾3¡Æ
Z: 30mm |
| Scan
Speed |
Up
to 10 um/sec |
Up
to 5 um/sec |
| Vertical
Resolution |
Up
to 0.1 nm |
| Option |
Motorized
Indexing Turret
Scanner Stroke 250um |
Manual
Indexing Turret |
Lens:
2.5x, 5x, 10x, 20x, 50x
Step Height Standard, Lateral Calibration Standard |
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