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The 2-dimensional measuring
precision is about 3um, and 3-dimensional
measuring
precision is up to 0.1um according to Object
lens of Scanning 3D Scope. In measuring 3-dimension,
this system can be applicable to grazing incidence
with in 85 degree.
CHM-250 can be operated in stable situation,
because CHM-250 uses high coherent light source
like LASER |
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Non-destructive Measurement |
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3D Surface |
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Sub-Micrometer Level Resolution |
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Large & Variable Measuring Range |
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Semiconductor Wafer |
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Materials Research |
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Surface Measurement |
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SMT & PCB |
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BGA Inspection |
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Bumping Inspection |
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FPD (LCD, OLED, PDP) |
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Mechanical Profiling |
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Soldering |
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Lead Frame Inspection |
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Burr Inspection |
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| 2D System |
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CAD File Import(Dxf File Format) |
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Auto Focus / Auto Illumination |
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Edge Detection / Pattern Match |
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Pattern Width, Height, Size Inspection |
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Defect Detection / Manual Inspect |
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Wafer Alignment / Data Review |
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Data File Save & Data Export to MS Excel |
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| 3D System |
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3D Surface Profiling Measurement |
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Roughness Measurement |
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Shape Measurement |
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Roundness Measurement |
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Height Measurement |
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Wafer Alignment / Data Review |
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Data File Save & Data Export to MS Excel |
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| Measurement
Function |
2D & 3D Measurement Functions, CAD Import/Export |
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Motion & Light control, Auto-focusing |
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Data Handling (Image I/O, Database I/O) |
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Macro (Stage Navigation, Repeat Measurement) |
| Image
Sampling Time |
< 30 frame/sec |
| 3D
Scanning Speed |
<
800 point/sec |
| XY
Measurement Accuracy |
2+3
L/1000um |
| Z
Measurement Accuracy |
>
0.1um (depends on objective lens) |
| Stage |
Fixed
Gantry Stage |
| Processor |
Pentium
IV Processor, 1G RAM, 40 GB HDD |
| OS |
Windows2000 |
| Dimension
(W x D x H) |
1200
x 1100 x 1500mm |
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| Inspection
Time |
< 30 frame/sec |
| Optics |
Motorized Zoom Optics |
| CCD
Camera |
1/2"
B/W |
| Data
Points |
307,200
Points (640x480) |
| Lens |
Dovetail
Tube 1.0x |
| Low |
High |
| N.A. |
0.009 |
0.15 |
| Magnification |
0.5 |
8.0 |
| F.O.V.[mm] |
9.6x12.8 |
0.6x0.8 |
| Light |
State
Light, 4-channel Ring Light, Coaxial Light |
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| Specification |
Rotation |
X-Axis |
Y-Axis |
Z-Axis |
| Material |
Granite
Assembly / Moving Part : AI6061-T6 |
| Finishes |
Hard
Anodized |
| Drive
Mechanism |
Direct
Drive |
Linear
Motor |
Linear
Motor |
Precision
Ball Screw |
| Bearings |
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Cross
Roller Guide |
Cross
Roller Guide |
Cross
Roller Guide |
| Motors |
DD
Servo Motor |
Linear
Motor |
Linear
Motor |
Micro-Stepping
Motor |
| Feedback |
Rotary
Encoder |
Linear
Encoder |
Linear
Encoder |
Linear
Encoder |
| Total
Travel |
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250mm |
250mm |
100mm |
| Encoder
Resolution |
655,360(p/rev) |
0.2um |
0.2um |
0.2um |
| Accuracy(after
calibration by Laser Interferometer) |
¡¾15arcsec |
¡¾3um |
¡¾3um |
¡¾3um |
Repeatability |
¡¾2arcsec |
¡¾1um |
¡¾1um |
¡¾1um |
| Max.Velocity |
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200mm/s |
200mm/s |
100mm/s |
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Lens assembly focal |
16 |
25 |
50 |
50 |
75 |
100 |
125 |
150 |
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Z(vertical)axis specifications |
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Repeatability 1¥ò(um) |
0.1 |
0.4 |
1 |
2 |
2 |
4 |
8 |
10 |
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Maximum working range |
0.5 |
1.8 |
8 |
8 |
18 |
35 |
45 |
70 |
| Angular
measurement range |
0-85
degrees |
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X(lateral)axis specifications |
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Resolution(um) |
5 |
12 |
15 |
20 |
25 |
35 |
50 |
50 |
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Data handling |
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Data rate |
Up
to 800 points per second |
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Maximum readings/scan |
7000
(in buffer) |
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General |
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Working Temperature |
18
to 35 degree |
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